Evaluation of three dimensional microstructures on silica glass fabricated by ion microbeam

Nishikawa, Hiroyuki*; Souno, T.*; Hattori, M.*; Oki, Y.*; Watanabe, E.*; Oikawa, Masakazu*; Arakawa, Kazuo; Kamiya, Tomihiro

no abstracts in English

Language	:	English
Journal	:	JAERI-Review 2003-033, TIARA Annual Report 2002
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Pages	:	p.254 - 256
Publication Year/Month	:	2003/11
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Paper URL	:	https://doi.org/10.11484/jaeri-review-2003-033
DOI for research data	:
Keywords	:	マイクロビーム; シリカガラス; 三次元微細構造; 顕微PLラマン; AFM; 高密度化; NBOHC; 光ファイバ; 屈折率変化; フィルター素子
Research Facility	:	TIARA(イオン照射研究施設)
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Article of JAEA R&D Review	:
Cooperating Institute	:	早稲田大学

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Registration No. : A20010178
JAEA Abstracts No. :
Paper Submission No. : 18291

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