AFM observation of nanosized SiC dots prepared by ion beam deposition

Xu, Y.; Narumi, Kazumasa; Miyashita, Kiyoshi*; Naramoto, Hiroshi

no abstracts in English

Language	:	English
Journal	:	Surface and Interface Analysis
Volume	:	35
Number	:	1
Pages	:	p.99 - 103
Publication Year/Month	:	2003/01
Meeting title	:	3rd International Symposium on Atomic Level Characterizations for New Materials and Devices '01 (ALC '01)
Held date	:	2001/11
Location (city)	:	Nara
Location (country)	:	Japan
Patent information	:
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Paper URL	:	https://doi.org/10.1002/sia.1502
DOI for research data	:	Link to research data related to this paper/report.
Keywords	:	IBD; Si; C; SiC; AFM; Nano-dot
Research Facility	:	TIARA(イオン照射研究施設)
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Web of Science® Times Cited Count	:	Times Cited Count： If you would like to get the latest times cited, please access the Web of Science®. http://www.webofknowledge.com/wos
InCites™	:	Percentile:24.55 Category:Chemistry, Physical
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Registration No. : B20010660
JAEA Abstracts No. :
Paper Submission No. : 25885

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