High-resolution elemental mapping of titanium oxide/aluminum oxide multilayer by spectrum-imaging

Kurata, Hiroki; Kumagai, Hiroshi*; Ozasa, kazunari*

no abstracts in English

Language	:	English
Journal	:	Journal of Electron Microscopy
Volume	:	50
Number	:	3
Pages	:	p.141 - 146
Publication Year/Month	:	2001/07
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Keywords	:	元素マッピング; STEM; EELS; 多層膜
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Registration No. : A20010266
JAEA Abstracts No. : 290976
Paper Submission No. : 18479

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