Precise control of Si(001) initial oxidation by translational kinetic energy of O $_{2}$ molecules

no abstracts in English

Language	:	English
Journal	:	Japanese Journal of Applied Physics, Part 1
Volume	:	41
Number	:	6B
Pages	:	p.4253 - 4260
Publication Year/Month	:	2002/06
Meeting title	:	2001 International Microprocess and Nanotechnology Conference (MNC 2001)
Held date	:	2001/10
Location (city)	:	Matsue
Location (country)	:	Japan
Patent information	:
PDF	:
Paper URL	:	https://doi.org/10.1143/JJAP.41.4253
DOI for research data	:
Keywords	:	O $_{2}$ ; Si(001); Oxidation; Translational Kinetic Energy
Research Facility	:
Press Release	:
Article of JAEA R&D Review	:
Cooperating Institute	:

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Registration No. : B20010705
JAEA Abstracts No. : 301031
Paper Submission No. : 19468

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Precise control of Si(001) initial oxidation by translational kinetic energy of O molecules

Precise control of Si(001) initial oxidation by translational kinetic energy of O $_{2}$ molecules