Effects of annealing and quenching treatments on reconstruction of rutile thin films on sapphire substrates

Choi, Y.; Yamamoto, Shunya; Abe, Hiroaki; Ito, Hisayoshi

Morphology change in rutile TiO2 thin films on sapphire substrate prepared by pulsed laser deposition under reduced oxygen envirnment was investigated as a function of film thickness, temperature and cooling treatment with AFM, XRD, and SEM/EDX. In case of 5 nm thick films, morphology strongly deponds on annealing and cooling treatments. Formation model of TiO2 particles on sapphire substrate is proposed based on instability of the substrate at elevated temperature.

Language	:	English
Journal	:	Surface Science
Volume	:	499
Number	:	2-3
Pages	:	p.203 - 209
Publication Year/Month	:	2002/03
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Paper URL	:	https://doi.org/10.1016/S0039-6028(01)01822-2
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Keywords	:	Titanium Oxide; AFM; Laser Ablation
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InCites™	:	Percentile:55.62 Category:Chemistry, Physical
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Registration No. : A20010486
JAEA Abstracts No. : 300564
Paper Submission No. : 19095

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