Boundary structure of Mo/Si multilayers for soft X-ray mirrors

Ishino, Masahiko; Yoda, Osamu; Haishi, Yasuyuki*; Arimoto, Fumiko*; Takeda, Mitsuhiro*; Watanabe, Seiichi*; Onuki, Somei*; Abe, Hiroaki

no abstracts in English

Language	:	English
Journal	:	Japanese Journal of Applied Physics, Part 1
Volume	:	41
Number	:	5A
Pages	:	p.3052 - 3056
Publication Year/Month	:	2002/05
Meeting title	:
Held date	:
Location (city)	:
Location (country)	:
Patent information	:
PDF	:
Paper URL	:	https://doi.org/10.1143/JJAP.41.3052
DOI for research data	:
Keywords	:	Mo/Si多層膜; 混合層; M(110)結晶粒径
Research Facility	:
Press Release	:
Article of JAEA R&D Review	:
Cooperating Institute	:

Accesses	:	- Accesses
Web of Science® Times Cited Count	:	Times Cited Count： If you would like to get the latest times cited, please access the Web of Science®. http://www.webofknowledge.com/wos
InCites™	:	Percentile:45.92 Category:Physics, Applied
Altmetrics	:

Registration No. : A20020051
JAEA Abstracts No. : 300791
Paper Submission No. : 19269

[CLARIVATE ANALYTICS], [WEB OF SCIENCE], [HIGHLY CITED PAPER & CUP LOGO] and [HOT PAPER & FIRE LOGO] are trademarks of Clarivate Analytics, and/or its affiliated company or companies, and used herein by permission and/or license.