Reaction dynamics of Si(001) oxidation at room temperature induced by supersonic O $_{2}$ molecular beams

no abstracts in English

Language	:	Japanese
Journal	:	Hyomen Kagaku
Volume	:	23
Number	:	9
Pages	:	p.553 - 561
Publication Year/Month	:	2002/09
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Paper URL	:	https://doi.org/10.1380/jsssj.23.553
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Keywords	:	Reaction Dynamics; Si(001); Oxidation; O $_{2}$ ; Supersonic Molecular Beam; Photoemission Spectroscopy; Incident Energy; Synchrotron Radiation
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Registration No. : A20020170
JAEA Abstracts No. : 301256
Paper Submission No. : 19670

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Reaction dynamics of Si(001) oxidation at room temperature induced by supersonic O molecular beams

Reaction dynamics of Si(001) oxidation at room temperature induced by supersonic O $_{2}$ molecular beams