Formation of ultra-thin SiO $_{2}$ layer on Si(100) by thermal decomposition of silicon alkoxide

Baba, Yuji ; Yamamoto, Hiroyuki; Sasaki, Teikichi

no abstracts in English

Language	:	English
Journal	:	Photon Factory Activity Report
Volume	:
Number	:	14
Pages	:	P. 423
Publication Year/Month	:	1996/00
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Keywords	:	SiO $_{2}$ ; Si(100); Silicon Alkoxide; Tetramethoxysilane; XPS; Synchtorton Radiation
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Registration No. : A19970064
JAEA Abstracts No. : 260373
Paper Submission No. : 15422

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Formation of ultra-thin SiO layer on Si(100) by thermal decomposition of silicon alkoxide

Formation of ultra-thin SiO $_{2}$ layer on Si(100) by thermal decomposition of silicon alkoxide