Refine your search:     
Report No.

XPS and XANES observations on non-stoichiometric SiN$$_{x}$$ produced by low-energy ion implantation

Ali, M.; Baba, Yuji ; Sekiguchi, Tetsuhiro ; Li, Y.; Yamamoto, Hiroyuki

no abstracts in English



- Accesses





[CLARIVATE ANALYTICS], [WEB OF SCIENCE], [HIGHLY CITED PAPER & CUP LOGO] and [HOT PAPER & FIRE LOGO] are trademarks of Clarivate Analytics, and/or its affiliated company or companies, and used herein by permission and/or license.