RBS/channeling, XRD and optical characterization of deep ion implantation into single crystalline SiO $_{2}$

Dai, Z.*; Yamamoto, Shunya; Naramoto, Hiroshi; Narumi, Kazumasa; Miyashita, Atsumi

no abstracts in English

Language	:	English
Journal	:	1998 International Conference on Ion Implantation Technology Proceedings, Vol.2
Volume	:
Number	:
Pages	:	p.1159 - 1162
Publication Year/Month	:	1998/06
Meeting title	:	12th International Conference on Ion Implantation Technology
Held date	:	1998/06
Location (city)	:	Kyoto
Location (country)	:	Japan
Patent information	:
PDF	:
Paper URL	:	https://doi.org/10.1109/IIT.1998.813889
DOI for research data	:
Keywords	:	SiO $_{2}$ ; Implantation; Au; Ion Beam Analysis; X-ray Diffraction; Optical Absorption; Colloids
Research Facility	:
Press Release	:
Article of JAEA R&D Review	:
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Registration No. : B19980520
JAEA Abstracts No. :
Paper Submission No. : 25645

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