Recovery of carbon-implanted silicon and germanium

not registered; Fujino, Yutaka*; Naramoto, Hiroshi; Ozawa, Kunio*

no abstracts in English

Language	:	English
Journal	:	Nuclear Instruments and Methods in Physics Research B
Volume	:	39
Number	:
Pages	:	p.409 - 412
Publication Year/Month	:	1989/00
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Patent information	:
PDF	:
Paper URL	:	https://doi.org/10.1016/0168-583X(89)90815-X
DOI for research data	:
Keywords	:	Ion Implantation; Ion Beam Analysis; Ge; Si; Carbon Ion
Research Facility	:
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Article of JAEA R&D Review	:
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Accesses	:	- Accesses
Web of Science® Times Cited Count	:	Times Cited Count： If you would like to get the latest times cited, please access the Web of Science®. http://www.webofknowledge.com/wos
InCites™	:	Percentile:51.19 Category:Instruments & Instrumentation
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Registration No. : A19890110
JAEA Abstracts No. :
Paper Submission No. : 9316

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