Metallic ion generation from ceramic rods by ECR ion source and thermodynamic feature of vaporization

Yokota, Wataru; Nara, Takayuki; Arakawa, Kazuo; not registered; not registered

no abstracts in English

Language	:	English
Journal	:	Nuclear Instruments and Methods in Physics Research B
Volume	:	122
Number	:	1
Pages	:	p.141 - 148
Publication Year/Month	:	1996/00
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Paper URL	:	https://doi.org/10.1016/S0168-583X(96)00771-9
DOI for research data	:
Keywords	:	ECRイオン源; 金属イオン; 棒状セラミック; 蒸気圧; セラミックの表面状態; 気化過程; 昇華; スパッタリング
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Accesses	:	- Accesses
Web of Science® Times Cited Count	:	Times Cited Count： If you would like to get the latest times cited, please access the Web of Science®. http://www.webofknowledge.com/wos
InCites™	:	Percentile:30.98 Category:Instruments & Instrumentation
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Registration No. : A19960502
JAEA Abstracts No. : 250359
Paper Submission No. : 14636

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