Variation of surface electric resistance for TiO $_{2}$ by reactive sputtering

Sasase, Masato*; not registered; Sasaki, Teikichi; Baba, Yuji ; Yamamoto, Hiroyuki

no abstracts in English

Language	:	English
Journal	:	Proc. of the 2nd Int. Symp. on Sputtering and Plasma Processes; ISSP93
Volume	:
Number	:
Pages	:	p.243 - 244
Publication Year/Month	:	1993/00
Meeting title	:	2nd Int. Symp. on Sputtering and Plasma Processes
Held date	:	1993/05
Location (city)	:	東京
Location (country)	:
Patent information	:
PDF	:
Paper URL	:
DOI for research data	:
Keywords	:	TiO $_{2}$ ; Surface Electric Resistance; XPS; UPS; Reactive Sputtering
Research Facility	:
Press Release	:
Article of JAEA R&D Review	:
Cooperating Institute	:

Accesses	:	- Accesses
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Registration No. : B19930188
JAEA Abstracts No. : 220174
Paper Submission No. : 12230

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Variation of surface electric resistance for TiO by reactive sputtering

Variation of surface electric resistance for TiO $_{2}$ by reactive sputtering