Characterization of defects in hot-implanted -SiC

Ito, Hisayoshi; Aoki, Yasushi; Yoshikawa, Masahito; Nashiyama, Isamu; Okumura, Hajime*; Yoshida, Sadafumi*

no abstracts in English

Language	:	English
Journal	:	13th Symp. on Materials Science and Engineering, Research Center of Ion Beam Technology, Hosei Nniv.
Volume	:	0
Number	:
Pages	:	p.75 - 80
Publication Year/Month	:	1994/12
Meeting title	:	第13回法政大学イオンビーム工学シンポジウム
Held date	:	1994/12
Location (city)	:	小金井
Location (country)	:
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DOI for research data	:
Keywords	:	シリコンカーバイド(SiC); イオン注入; 電子スピン共鳴(ESR); フォトルミネッセンス; 欠陥
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Registration No. : B19941169
JAEA Abstracts No. : 230266
Paper Submission No. : 12938

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