Microchannel formation in polyimide by heavy ion irradiation; For the electric packaging board

Matsumoto, Yasuyo*; Matsuura, Yuki*; Hibino, Yutaka*; Kawakami, Koichi*; Komaki, Yoshihide; not registered; Sakurai, Tsutomu; Tachikawa, Enzo

no abstracts in English

Language	:	Japanese
Report No.	:	JAERI-M 93-196
Pages	:	40 Pages
Publication Year/Month	:	1993/10
Patent information	:
PDF	:	JAERI-M-93-196.pdf:2.79MB
Paper URL	:	https://doi.org/10.11484/jaeri-m-93-196
Keywords	:	ポリイミド; 電子実装基板; 重イオン; 細溝; エッチング; ガンマ線; 電子顕微鏡; V $_{T}$ ; V $_{B}$
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Article of JAEA R&D Review	:
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Registration No. : M19930196
JAEA Abstracts No. : 210879

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