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Field emission-type scanning electron microscope for examination of irradiated fuels

照射済燃料用電解放射形走査型電子顕微鏡(FE-SEM)の開発

安田 良; 三田 尚亮; 西野 泰治; 仲田 祐仁; 野沢 幸男; 原田 克也; 串田 輝雄; 天野 英俊

Yasuda, Ryo; Mita, Naoaki; Nishino, Yasuharu; Nakata, Masahito; Nozawa, Yukio; Harada, Katsuya; Kushida, Teruo; Amano, Hidetoshi

照射済燃料・材料の表面微細組織観察をするために原研・燃料試験施設に設置した。FE-SEMは、オペレーターの安全を確保するために、遮へい容器に据え付けられた。その遮へい容器には遠隔操作を円滑に進めるためのマニプレータ等の機器が取り付けられている。また、放射線の影響を低減させるためのコリメータを取り付けたEDSも、観察領域の組成分析をするために設置された。設置後、性能確認のために、金蒸着膜,水素処理したジルカロイ被覆管を観察試験した。その結果、良好な画像が取得できたことから、改造・設置後も所期性能を保っていることを確認した。

The Field Emission type Scanning Electron Microscope (FE-SEM), which is one of effective tools for observation of micr-structures, was installed at the Reactor Fuel Examination Facility (RFEF) in JAERI. The FE-SEM is equipped in a large shield vessel with remote handling systems to keep safety of operators and is modified to enable to manipulate high radioactive materials. The Energy Dispersive Spectrometer (EDS) with radiation-shielded collimators has been also equipped on the FE-SEM to determine element compositions of the observed material samples. Characterization tests were carried out using deposited gold film and Zircaloy cladding tubes with hydrides to confirm the machine performance after the modifications. In the results of the tests, high-resolution images without some noises and fogs were obtained with high magnification above 10,000. Those results show that the FE-SEM keeps the high performance after some improvements and modifications for shielding $$gamma$$-rays and handling radioactive samples.

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パーセンタイル:100

分野:Nuclear Science & Technology

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