In-situ observation of surface blistering in silicon by deuterium and helium ion irradiation

Igarashi, Shinichi; Muto, Shunsuke*; Tanabe, Tetsuo*; Aihara, Jun ; Hojo, Kiichi

no abstracts in English

Language	:	English
Journal	:	Surface & Coatings Technology
Volume	:	158-159
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Pages	:	p.421 - 425
Publication Year/Month	:	2002/09
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Keywords	:	Surface Blistering; Surface Topography; Electron-illumination Effect; Flux Dependence; Grazing Incidence Electron Microscopy; In-situ Observation; Silicon; Gas Ion Irradiation; Deuterium; Helium
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Registration No. : A20020629
JAEA Abstracts No. : 320450
Paper Submission No. : 20909

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