RHEED observation of BaTiO thin films grown by MBE

チタン酸バリウム薄膜成長のRHEED観察

米田 安宏   ; 阪上 潔*; 寺内 暉*

Yoneda, Yasuhiro; Sakaue, Kiyoshi*; Terauchi, Hikaru*

強誘電体であるチタン酸バリウム薄膜を厚さ10モノレイヤーでチタン酸ストロンチウム基板上にMBEを用いて作製した。作製は同時蒸着と交互蒸着の2種類の方法で行った。成長中はRHEED観察によって薄膜がエピ成長していることを確認し、成長後はX線回折によって、良質の単結晶薄膜であることを確かめた。

Ferroelectric BaTiO thin filmwith a thickness of 10ML were epitaxally grown on SrTiO (001) substrate by very slow deposition using MBE. The investigation were carried out by two growth methods: (i) codeposition and (ii) alternate deposition. In-situ observation of RHEED confirmed that an epitaxial cube-on-cube structure was prepared. After the deposition, X-ray diffraction measurements were carried out. The 10-ML-thick BaTiO films were highly -axis oriented single crystals with good film quality.