Effect of target compositions on the crystallinity of -FeSi prepared by ion beam sputter deposition method

Yamaguchi, Kenji; Heya, Akira*; Shimura, Kenichiro; Katsumata, Toshinobu*; Yamamoto, Hiroyuki; Hojo, Kiichi

no abstracts in English

Language	:	English
Journal	:	Thin Solid Films
Volume	:	461
Number	:	1
Pages	:	p.17 - 21
Publication Year/Month	:	2004/08
Meeting title	:	8th IUMRS International Conference on Advanced Materials (IUMRS-ICAM 2003)
Held date	:	2003/10
Location (city)	:	Yokohama
Location (country)	:	Japan
Patent information	:
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Paper URL	:	https://doi.org/10.1016/j.tsf.2004.02.052
DOI for research data	:	Link to research data related to this paper/report.
Keywords	:	シリサイド半導体; ベータ鉄シリサイド; イオンビームスパッタ蒸着法; 結晶構造; ターゲット組成
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Web of Science® Times Cited Count	:	Times Cited Count： If you would like to get the latest times cited, please access the Web of Science®. http://www.webofknowledge.com/wos
InCites™	:	Percentile:25.08 Category:Materials Science, Multidisciplinary
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Registration No. : B20030187
JAEA Abstracts No. : 42001141
Paper Submission No. : 14785

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