Characterization of B-C-N hybrid prepared by ion implantation

Shimoyama, Iwao ; Baba, Yuji ; Sekiguchi, Tetsuhiro ; Nath, K. G.; Sasaki, Masayoshi*; Okuno, Kenji*

Ion implantation method is applied to synthesize B-C-N hybrids and their electronic structures are characterized by X-ray photoelectron spectroscopy. A boron nitride film is deposited on a graphite target by borazine plasma implantation. At the interface between the BN film and the graphite, variety of bonding combinations including B-N, B-C, and C-N are observed. This proved that B-C-N hybrids is formed by this method.

Language	:	English
Journal	:	Journal of Vacuum Science and Technology A
Volume	:	21
Number	:	6
Pages	:	p.1843 - 1848
Publication Year/Month	:	2003/11
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Paper URL	:	https://doi.org/10.1116/1.1611887
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Keywords	:	B-C-Nハイブリッド; イオン注入; X線光電子分光; XPS; ボラジン; グラファイト; 窒化ホウ素
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InCites™	:	Percentile:28.18 Category:Materials Science, Coatings & Films
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Registration No. : A20030358
JAEA Abstracts No. : 320187
Paper Submission No. : 20710

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