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Characterization of B-C-N hybrid prepared by ion implantation

Shimoyama, Iwao  ; Baba, Yuji ; Sekiguchi, Tetsuhiro ; Nath, K. G.; Sasaki, Masayoshi*; Okuno, Kenji*

Ion implantation method is applied to synthesize B-C-N hybrids and their electronic structures are characterized by X-ray photoelectron spectroscopy. A boron nitride film is deposited on a graphite target by borazine plasma implantation. At the interface between the BN film and the graphite, variety of bonding combinations including B-N, B-C, and C-N are observed. This proved that B-C-N hybrids is formed by this method.

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Category:Materials Science, Coatings & Films

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