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Fabrication of multilayer mirrors consisting of oxide and nitride layers for continual use across the K-absorption edge of carbon

Ishino, Masahiko; Yoda, Osamu

The development of multilayer mirrors for continual use around the K-absorption edge of carbon (4.4 nm) has been begun. Co$$_3$$O$$_4$$, SiO$$_2$$, and BN are found to be suitable for multilayer mirrors based on theoretical calculations for wavelengths around the carbon K-absorption edge region. X-ray reflectivity curves with Cu$$K$$$$_{alpha1}$$ X rays of the fabricated Co$$_3$$O$$_4$$/SiO$$_2$$ multilayers have sharp Bragg peaks and the layer structures evaluated from TEM observations are uniform. On the other hand, the Bragg peaks of Co$$_3$$O$$_4$$/BN multilayers split and aggregated Co$$_3$$O$$_4$$ is observed. To improve the Co$$_3$$O$$_4$$ layer structure, Cr$$_2$$O$$_3$$ was mixed into Co$$_3$$O$$_4$$. The mixed oxide layer structure in the Mix/BN multilayer (Mix = Co$$_3$$O$$_4$$ + Cr$$_2$$O$$_3$$) is relatively uniform and the Bragg peaks do not split.

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Category:Optics

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