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Reflectivity enhancement of large ${it m}$-Qc supermirror by ion polishing

イオンポリッシュ法による高${it m}$-Qc多層膜スーパーミラーの高反射率化

曽山 和彦  ; 角田 治彦*; 村上 勝彦*

Soyama, Kazuhiko; Tsunoda, Haruhiko*; Murakami, Katsuhiko*

イオンポリッシュ法をNi/Ti多層膜スーパーミラーに適用し、高反射率化に成功した。実験は、イオンポリッシュ条件として、Ar$$^{+}$$イオンの照射時間,加速電圧,イオン入射角度を最適化した。これに基づき、3Qcスーパーミラー(407層)についてNi層のみにイオンポリッシュ法を適用したところ、臨界角での中性子反射率を80%から90%に増加させることができた。

An ion polishing technique has been applied to supermirror coating in order to enhance neutron reflectivity. A Ni/Ti supermirror with a critical value of 3Qc and the total number of layers of 407 was coated in combination with ion polishing. The dependencies of Ar$$^{+}$$ ion polishing time, ion acceleration energy and incidence angle on the interface roughness were studied and optimized by using X-ray and neutron reflectometry. The reflectivity of the supermirror was measured at the JRR-3 reflectometer of cold beam line. It has reached 90% at the external critical angle, although the non polished one has the reflectivity of 80%.

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パーセンタイル:36.42

分野:Instruments & Instrumentation

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