Reflectivity enhancement of large -Qc supermirror by ion polishing

イオンポリッシュ法による高-Qc多層膜スーパーミラーの高反射率化

曽山 和彦  ; 角田 治彦*; 村上 勝彦*

Soyama, Kazuhiko; Tsunoda, Haruhiko*; Murakami, Katsuhiko*

イオンポリッシュ法をNi/Ti多層膜スーパーミラーに適用し、高反射率化に成功した。実験は、イオンポリッシュ条件として、Arイオンの照射時間,加速電圧,イオン入射角度を最適化した。これに基づき、3Qcスーパーミラー(407層)についてNi層のみにイオンポリッシュ法を適用したところ、臨界角での中性子反射率を80%から90%に増加させることができた。

An ion polishing technique has been applied to supermirror coating in order to enhance neutron reflectivity. A Ni/Ti supermirror with a critical value of 3Qc and the total number of layers of 407 was coated in combination with ion polishing. The dependencies of Ar ion polishing time, ion acceleration energy and incidence angle on the interface roughness were studied and optimized by using X-ray and neutron reflectometry. The reflectivity of the supermirror was measured at the JRR-3 reflectometer of cold beam line. It has reached 90% at the external critical angle, although the non polished one has the reflectivity of 80%.