Observation of iron silicide formation by plan-view transmission electron microscopy

Igarashi, Shinichi*; Haraguchi, Masaharu*; Aihara, Jun ; Saito, Takeru*; Yamaguchi, Kenji; Yamamoto, Hiroyuki; Hojo, Kiichi

no abstracts in English

Language	:	English
Journal	:	Journal of Electron Microscopy
Volume	:	53
Number	:	3
Pages	:	p.223 - 228
Publication Year/Month	:	2004/08
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Paper URL	:	https://doi.org/10.1093/jmicro/53.3.223
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Keywords	:	シリサイド系半導体; ベータ鉄シリサイド; 透過電子顕微鏡; 電子エネルギー損失分光; 固相反応; 薄膜成長; 相変化; 相互拡散
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Web of Science® Times Cited Count	:	Times Cited Count： If you would like to get the latest times cited, please access the Web of Science®. http://www.webofknowledge.com/wos
InCites™	:	Percentile:24.19 Category:Microscopy
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Registration No. : A20040137
JAEA Abstracts No. : 330158
Paper Submission No. : 21560

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