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Report No.

Manufacture of high-speed neutral atomic and molecular beam apparatus and its characterization

Hachiue, Shunsuke; Teraoka, Yuden

In order to progress chemical reaction studies at verious material surfaces using high speed and reactive ions and neutral particles beams, a high-speed neutral atomic and molecular beam apparatus has been developed. In this report, details of the apparatus and characteristics of actually-generated oxygen atomic and molecular ion/neutral beams are discribed. This apparatus is a ultra-high vacuum system consisting of a plasma ion source, electrostatic lens systems, a mass separator, and a charge transfer chamber. Total oxygen ion currents of 52 microamps at accerelation energy of 8 keV and 17 microamps even at 20 eV were obtained. Mass separation was also good so that an oxygen molecular ion beam of 11 microamps and an oxygen atomic ion beam of 5.5 microamps were obtained even at 20 eV. A neutral oxygen atomic or molecular beam was also generated with the flux density of 10$$^{12}$$ particles/cm$$^{2}$$/s.



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