リアルタイム光電子分光によるTi(0001)表面酸化反応の観察

Oxidation reaction kinetics on Ti(0001) surface studied by real-time photoelectron spectroscopy

高桑 雄二*; 小川 修一*; 石塚 眞治*; 吉越 章隆 ; 寺岡 有殿

Takakuwa, Yuji*; Ogawa, Shuichi*; Ishizuka, Shinji*; Yoshigoe, Akitaka; Teraoka, Yuden

Ti(0001)表面酸化反応を高輝度放射光とHe-I共鳴線を用いた光電子分光でリアルタイムモニタリングした。Ti2pとO1s内殻準位,価電子帯の光電子スペクトルから求めた酸素吸着量,酸化状態,酸化膜厚,電子状態,仕事関数の時間発展から解明した酸素吸着モデルと極薄酸化膜形成過程について解説した。

Oxidation reactions of Ti(0001) surfaces were monitored by real-time photoelectron spectroscopy with high brilliant synchrotron radiation and He-I resonance line. An oxygen adsorption model and ultra-thin oxide layers formation processes were reviewed on the basis of time evolutions of the adsorbed oxygen amount, oxidation states, electronic states and the work function, which were obtained from photoelectron spectra for Ti 2p and O 1s core levels as well as the valence band.