Improvement of ion microbeam scanning system in JAERI Takasakai; Development of proton beam writing

Sakai, Takuro; Sato, Takahiro; Ishii, Yasuyuki; Oikawa, Masakazu*; Shimada, Hirofumi*; Haga, Junji*

no abstracts in English

Language	:	Japanese
Journal	:	Dai-18-Kai Tandemu Kasokuki Oyobi Sono Shuhen Gijutsu No Kenkyukai Hokokushu
Volume	:
Number	:
Pages	:	p.73 - 76
Publication Year/Month	:	2005/10
Meeting title	:	第18回タンデム加速器及びその周辺技術の研究会
Held date	:	2005/07
Location (city)	:	福岡
Location (country)	:	日本
Patent information	:
PDF	:
Paper URL	:
DOI for research data	:
Keywords	:	マイクロビーム; 描画; 微細加工; 高アスペクト比
Research Facility	:	TIARA(イオン照射研究施設)
Press Release	:
Article of JAEA R&D Review	:
Cooperating Institute	:

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Registration No. : B20050520
JAEA Abstracts No. : 34000872
Paper Submission No. : 998

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