Spectroscopic study of reaction mechanism of laser-ablated silicon ions and neutrals with benzene molecules

Saeki, Morihisa; Oba, Hironori  ; Yokoyama, Atsushi

We have performed laser ablation of silicon in neon gas and benzene vapor. The reaction mechanism of the ablated silicon atoms with the neon atoms and benzene molecules were investigated by space- and time-resolved emission spectroscopy. The ablation in the neon gas suggested that (1) the neutral neon atoms are excited to 2pn states lying in 18-19 eV and (2) the neutral neon atoms are excited by electronic-to-electronic and translational-to-electronic energy transfer from the silicon ions. In the ablation in the benzene vapor, we found that the benzene molecules are decomposed into C2 and CH radicals by the collision with the silicon atoms.