Direct writing of conductive aluminum line on aluminum nitride ceramics by transversely excited atmospheric CO $_{2}$ laser

Ishii, Katsunori ; Takahashi, Akira*; Sumiyoshi, Tetsumi*; Obara, Minoru*

no abstracts in English

Language	:	English
Journal	:	Applied Physics Letters
Volume	:	71
Number	:	19
Pages	:	p.2758 - 2760
Publication Year/Month	:	1997/00
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Paper URL	:	https://doi.org/10.1063/1.120125
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Keywords	:	no keyword
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Registration No. : 08-1997-0174
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Direct writing of conductive aluminum line on aluminum nitride ceramics by transversely excited atmospheric CO laser

Direct writing of conductive aluminum line on aluminum nitride ceramics by transversely excited atmospheric CO $_{2}$ laser