Real-time in-situ photoelectron spectroscopy of surface temperature dependence for Ti(0001) nitridation reaction processes

Ogawa, Shuichi*; Takakuwa, Yuji*; Ishizuka, Shinji*; Yoshigoe, Akitaka ; Teraoka, Yuden; Mizuno, Yoshiyuki*

Nitridation reactions of a Ti(0001) surface, induced by supersonic nitrogen molecular beams, were analysed via real-time in-situ photoemission spectroscopy with synchrotron radiation. Surface temperature dependence of nitrogen uptake curves and nitrided chemical bonding states were investigated. The incident energy range of supersonic nitrogen molecular beams was from 0.03 eV to 1.99 eV. Surface temperature was set at 27C, 200C, and 400C. The photon energy of synchrotron radiation was 668 eV. A photoemission spectrum of N1s peak could be recorded successfully with a period of 26s. Although the N1s photoemission peak was composed of 2 components at 27C and 200C, an additional conponent was needed at 400C.