X-ray photoelectron spectroscopic observation on B-C-N hybrids synthesized by ion beam deposition of borazine

Uddin, M. N.; Shimoyama, Iwao   ; Baba, Yuji  ; Sekiguchi, Tetsuhiro  ; Nagano, Masamitsu*

B-C-N hybrid thin films were grown from ion beam plasma of borazine (BNH) on graphite substrate at room temperature, 600C, and 850C. The films were characterized by X-ray photoelectron spectroscopy (XPS). XPS study suggested that B and N atoms in the deposited films are in a wide variety of chemical bonds e.g., B-C, B-N, N-C, and B-C-N. The substrate temperature and ion fluence were shown to have significant effect on the coordination and elemental binding states on the B-C-N hybrids. It was found that B-C-N hybrid formation is enhanced at high temperature, and this component is dominantly synthesized at low fluence. The results imply that it is possible to control the composition of B-C-N hybrid by changing the ion fluence and the temperature during ion implantation.