The Synthesis of B-C-N hybrid by ion beam deposition with aromatic molecules

Shimoyama, Iwao   ; Shigezumi, Kazuya*; Baba, Yuji  ; Sekiguchi, Tetsuhiro  ; Hirao, Norie*; Nagano, Masamitsu*

Extreme low-energy ion beam deposition (IBD) method is devoted to synthesize boron carbon nitride (B-C-N) hybrid thin film. Several combinations of source gases, i.e., borazine (BNH), triazine (CNH), and benzene (CH), are used as precursor for the method in order to study the precursor effect. The characterization of the thin films is done by X-ray photoelectron spectroscopy (XPS). The precursor effect is observed at three points, (1) composition ratio (2) bond formation and (3) layered structure. XPS spectra show the composition ratio basically reflects the element ratio of each precursor. The existence of various kinds of bonds is observed in the B, C, and N 1s photoelectron peaks of the films and the formation of the bonds depends on the combination of source gas. The mixture of borazine and benzene precursor derives C-C, C-N, B-C, and B-N bonds formation. On the other hand, other gases scarcely derive B-C bond formation. We propose that this is caused by a layered structure caused by the viscosity difference of the precursor molecules. Finally, we conclude that the mixture of borazine and benzene is the most preferable for B-C-N synthesis by the IBD method among the precursor gases.