A Novel room temperature oxidation technique using hyperthermal broad atomic/molecular beams

Tagawa, Masahito*; Yokota, Kumiko*; Yoshigoe, Akitaka ; Teraoka, Yuden

Synchrotron radiation photoelectron spectroscopy (SR-PES) and crystal truncation rod (CTR) scattering profiles were used to investigate an ultra-thin SiO $_{2}$ overlayer on an Si(001) surface formed by a 5-eV-O-atom beam at room temperature. The SR-PES spectra indicated that the suboxides in the oxidized film formed by the O atom beams were concentrated on the SiO $_{2}$ surface rather than at the Si/SiO $_{2}$ interface. The CTR scattering data of the O-atom-beam oxidation film suggested a lower content of the SiO $_{2}$ ordered structure in the oxide film. An inverse diffusion of the interstitial Si atoms in the oxidation kinetics can explain the data.

Language	:	English
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Meeting title	:	2nd International Workshop on Oxidation Reactions
Held date	:	2006/05
Location (city)	:	Suita
Location (country)	:	Japan
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DOI for research data	:	Link to research data related to this paper/report.
Keywords	:	no keyword
Research Facility	:	SPring-8(大型放射光施設)
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Article of JAEA R&D Review	:
Cooperating Institute	:	神戸大学

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Registration No. : BB20060388
JAEA Abstracts No. :
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