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Report No.
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Hyperthermal molecular beam deposition of DLC using laser-induced detonation phenomena

Tagawa, Masahito*; Asada, Hidetoshi*; Matsuura, Yoshimitsu*; Yokota, Kumiko*; Teraoka, Yuden; Kitamura, Akira*; Fontaine, J.*; Belin, M.*

New room-temperature deposition technology of a hydrogenated diamond-like carbon (DLC) film was developed with hyperthermal hydrocarbon beams. Four CH$$_{4}$$ molecular beams with different beam energy and ion composition were prepared and deposited DLC films were evaluated by various surface analytical methods including Raman spectroscopy, RBS and SR-PES. It was found that hydrogenated (20-30%) DLC films can be deposited with use of CH$$_{4}$$ as a source gas. It was also shown that the DLC film deposited with a CH$$_{4}$$ beam including relatively high ion component exhibit better tribological properties.

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