Generation of the submicron soft X-ray beam using the Fresnel zone plate

Nishikino, Masaharu; Kawazome, Hayato; Tanaka, Momoko; Kishimoto, Maki; Hasegawa, Noboru; Ochi, Yoshihiro; Kawachi, Tetsuya; Sukegawa, Kota; Yamatani, Hiroshi; Nagashima, Keisuke; Kato, Yoshiaki 

We have developed a fully coherent X-ray laser at 13.9 nm and the application research has been started. The submicron X-ray beam can be generated by the soft X-ray laser with using optical elements. The theoretical calculation shows that it is expected to obtain the spot diameter of about 300 nm with a Fresnel zone plate. The submicron X-ray beam is used as the X-ray source for the Fourie-transform holography and the local irradiation of the material. The focusibility of the X-ray beam and the application research using the submicron X-ray beam will be presented.