Real-time photoelectron spectroscopy for Nitridation at Ti(0001) surface using supersonic N molecular beams

Ogawa, Shuichi*; Takakuwa, Yuji*; Ishizuka, Shinji*; Yoshigoe, Akitaka ; Teraoka, Yuden; Mizuno, Yoshiyuki*

Nitridation on a Ti(0001)-11 surface using a supersonic N molecular beam was investigated by real-time photoelectron spectroscopy to clarify the adsorption reaction dynamics of N molecule on the Ti surface. In a whole N dosage region examined, N 1s spectra can be fitted well with two chemically-shifted components, the binding energies of which are 396.9 and 396.6 eV, respectively. For both the components, the initial sticking probability S shows a decrease with increasing incident energy in the overall trend, while has significant minima at 0.3 and 1.5 eV. Such incident energy dependences of S suggest that the chemisorbed states are similarly caused by a trapping-mediated adsorption process through a physisorption state at lower incident energy than 0.3 eV and an activated adsorption process becomes dominant at higher incident energy than 0.3 eV.