Characterization of silicon carbide coating synthesized from Si-based polymers

Sugimoto, Masaki; Takano, Katsuyoshi; Wach, R. A.; Yoshikawa, Masahito

Silicon carbide (SiC) ceramic coating coating can be utilized for gas separation in process for hydrogen production. We developed the SiC coating by precursor polymer method. Spinning method was applied to coat the AlO ceramic plates with preceramic polymers of polycarbosilane and polyvinylsilane and their blends. The coated plates were cured by electron beam (EB) to the total dose of 2 MGy. The polymer on the surface was crosslinked with oxygen present in the atmosphere during irradiation. Samples were pyrolized at 850 C in argon atmosphere in order to convert into SiC ceramics. Examination by SEM was applied to elucidate the coated surface and the gas of hydrogen, and nitrogen permeation was measured. Rutherford backscattering spectroscopy (RBS) using 2.0 MeV He ions was employed to determine the composition and the thickness of the films.