Molecular steric effects in dissociative adsorption of NO at Si(111)-77 surface

Hashinokuchi, Michihiro*; Moritani, Kosuke*; Okada, Michio*; Teraoka, Yuden; Kasai, Toshio*

The dynamical processes such as energy transfer of molecules to surface, etc. play an important role in surface chemical reactions. Therefore, it is expected that molecular orientation affects the reaction rate and product compositions. In this study, we investigated the reaction dynamics in the NO/Si(111)-77 system using oriented molecular beam and XPS. Uptake curves of O1s and N1s for incidence of the oriented NO molecular beam were measured at surface temperature of 400 K. These results indicate that this reaction is the dissociative adsorption which is non-selective for N and O atom adsorption at 400 K. In addition, we found that N-end collision was more effective for the reaction than O-end collision.