Outline of micro-XAFS system installed at the synchrotron soft X-ray beamline

Baba, Yuji  ; Sekiguchi, Tetsuhiro  ; Shimoyama, Iwao   ; Hirao, Norie*

The present report summarizes the outline and details of synchrotron soft X-ray micro-XAFS (X-ray absorption fine structure) system installed at the synchrotron beamline (BL-27A) of the Photon Factory (PF), High Energy Accelerator Research organization (KEK). The system was installed for the purpose of measuring morphology, element-selective and chemical-state-selective mappings of solid surfaces at micrometer or nanometer scale. In this report, the detailed outlines, specification, and operation manual are firstly described. Then the experimental data about the observations on Si micro-pattern and estimation of spacial resolution using ultraviolet light are presented.Preliminary experimental results for chemical-state-selective mapping of Si/SiO micro-patterns using synchrotron radiation are also presented.