Si atom emission kinetics during oxidation on Si(001) surfaces, 10; Correlation between strained Si atoms and growth rate

Ogawa, Shuichi*; Yoshigoe, Akitaka ; Ishizuka, Shinji*; Teraoka, Yuden; Takakuwa, Yuji*

no abstracts in English

Language	:	Japanese
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Meeting title	:	2007年(平成19年)春季第54回応用物理学関係連合講演会
Held date	:	2007/03
Location (city)	:	相模原
Location (country)	:	日本
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Keywords	:	no keyword
Research Facility	:	SPring-8(大型放射光施設)
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Article of JAEA R&D Review	:
Cooperating Institute	:	東北大学

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Registration No. : BB20062834
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