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High-energy total reflection X-ray photoelectron spectroscopy for polished iron surface

Nagoshi, Masayasu*; Kawano, Takashi*; Makiishi, Noriko*; Baba, Yuji  ; Kobayashi, Katsumi*

Grazing incidence X-ray photoelectron spectroscopy (XPS) has been applied to mirror-polished stainless steel sheets and Si-wafer using incident X-ray with high energy from synchrotron radiation. Monochromatized X-ray with the energy of 1.8 keV to 3.6 keV was irradiated to the sample surfaces with various incident angles. Total reflection condition with the high-energy incident X-ray provides us X-ray photoelectron spectra having remarkably low background intensity. The results will be compared with background calculations in previous researches and discussed in terms of the penetration depth of X-ray and inelastic mean free path of photoelectrons. We also discuss the depth information of the obtained spectra.

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Category:Chemistry, Physical

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