Production of 3-D resit structures on silicon plates by a proton beam writing technique

Furuta, Yusuke*; Uchiya, Naoyuki*; Nishikawa, Hiroyuki*; Haga, Junji; Oikawa, Masakazu*; Sato, Takahiro; Ishii, Yasuyuki; Kamiya, Tomihiro

no abstracts in English

Language	:	Japanese
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Meeting title	:	2007年(平成19年)春季第54回応用物理学関係連合講演会
Held date	:	2007/03
Location (city)	:	相模原
Location (country)	:	日本
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Keywords	:	no keyword
Research Facility	:	TIARA(イオン照射研究施設)
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Cooperating Institute	:	芝浦工業大学

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Registration No. : BB20070059
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