Micro-machining of resists by proton beam writing, 2; Fabrication of 3-D structures using a negative resist

Uchiya, Naoyuki; Furuta, Yusuke*; Nishikawa, Hiroyuki*; Haga, Junji; Sato, Takahiro; Oikawa, Masakazu*; Okubo, Takeru; Ishii, Yasuyuki; Kamiya, Tomihiro; Yamamoto, Shunya

no abstracts in English

Language	:	Japanese
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Meeting title	:	第2回高崎量子応用研究シンポジウム
Held date	:	2007/06
Location (city)	:	高崎
Location (country)	:	日本
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Keywords	:	no keyword
Research Facility	:	TIARA(イオン照射研究施設)
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Cooperating Institute	:	芝浦工業大学

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Registration No. : BB20070987
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