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Electron beam-induced color imaging of acid-chromic polymer films

Enomoto, Kazuyuki; Yuasa, Kanako*; Kato, Jun*; Matsushita, Harumi*; Yamashita, Takashi*; Ito, Kazuo*; Yoshida, Masaru; Maekawa, Yasunari

The polymer films with acid-responsive chromic molecules Rhodamine B base and 4,4'-bis(dimethylamino)benzhydrol as an acid-chromic compound with electron beam-acid generators were well designed for the novel electron beam-induced color imaging system. Electron beam scanning direct drawing of the acid-chromic polymer films gave clear color imaging of 100-200 nm line/space patterns with a dose of only 10 $$mu$$C cm$$^{-2}$$.

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