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Electron beam-induced reaction of polymer films containing chromic dye molecules

Enomoto, Kazuyuki; Yuasa, Kanako*; Kato, Jun*; Matsushita, Harumi*; Yamashita, Takashi*; Ito, Kazuo*; Yoshida, Masaru; Maekawa, Yasunari

A color forming performance for fabricating nanoscale patterned polymer films has been examined using electron beam direct writing (EBDW) techniques. Upon EB irradiation the poly(methyl methacrylate) film consisting of 3 wt% bis(dimethylamino)benzhydrol and the equimolar sulfonium salt has an absorption band at 560 nm, which is assigned to protonated benzhydrol. The appearance of the new band at 560 nm with an isosbestic point in the spectral changes of indicates the quantitative transformation from colorless benzhydrol to the protonated form. The film is then exposed with a raster scanning by EBDW. Upon EB irradiation they also undergo chemical changes to provide optical differentiation between the exposed and unexposed regions. The blue-colored line/space patterns of 100 - 200 nm with a dose of 10 $$mu$$C/cm$$^{2}$$ are achieved.

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