Generation of soft X-ray submicron beam using Fresnel phase zone plate

Nishikino, Masaharu; Kawazome, Hayato*; Nagashima, Keisuke

The highly brilliant X-ray source is one of promising tool for new scientific research. Since the first demonstration of a collisional pumped soft X-ray laser (XRL), which has been developed as a highly coherent X-ray source, the application research using the XRL beam has been progressed. A focused X-ray beam with a high intensity and a micron-order scale is expected to open various fields. We have demonstrated a submicron soft X-ray beam using a Fresnel phase zone plate (FPZP) with a highly efficiency of first-order diffraction X-rays. The highly coherent XRL at wavelength l of 13.9 nm is focused to a 0.5-m spot size at full width of half maximum (FWHM) with a peak intensity of about 10W/cm.