Behavior of transition into inductively coupled plasma mode with internal radio frequency multiturn antenna

Nakagaki, Keita; Yamauchi, Toshihiko; Kanno, Yoshinori*; Kobayashi, Seiji*; Takemoto, Ryo*

The CVD system with internal RF multi-turn antenna coil for 27.12 MHz was developed, and to study the transition between CCP (Capacitively Coupled Plasma) and ICP (Inductively Coupled Plasma). The observed transition was classified into three types of transition: the standard transition, the direct transition without the CCP-mode and the repeated transition. The power boundary condition for each transition which is associated with the gas pressure and RF power is presented. Here, the standard transition was mainly presented: The transition time was 8 s at 10 Pa, which became longer with the increase of gas pressure. The increments of electron temperature and density by the transition into ICP were three times and double figures higher respectively.