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Report No.
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Effects of catalyst on gasochromic properties in tungsten oxide films

Inoue, Aichi; Yamamoto, Shunya; Nagata, Shinji*; Yoshikawa, Masahito; Shikama, Tatsuo*

We investigated effects of catalyst on gasochromic properties in tungsten oxide films. Amorphous WO$$_{3}$$ films coated with Pd and Pt catalysts were prepared on SiO$$_{2}$$ substrates by employing reactive RF magnetron sputtering. The field emission scanning electron microscope (FE-SEM) showed that particles with a dozes nm diameter of Pd and with a few nm of Pt grew on the surface at beginning of deposition. The continuous catalytic layers were observed with increasing the amounts of more than 2 nm for Pd and 0.2 nm for Pt catalysts, respectively. When the continuous layers formed on WO$$_{3}$$ surface, the excellent gasochromic properties were obtained. The results indicated that Pt catalysts were suitable for high sensitive hydrogen sensors consisting of gasochromic WO$$_{3}$$ films.

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