Decrease in ion beam induced charge of 6H-SiC diodes

Onoda, Shinobu; Iwamoto, Naoya; Oshima, Takeshi; Hirao, Toshio; Kawano, Katsuyasu*

no abstracts in English

Language	:	English
Journal	:	Proceedings of the 26th Symposium on Materials Science and Engineering, Research Center of Ion Beam Technology Hosei University
Volume	:
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Pages	:	p.35 - 40
Publication Year/Month	:	2007/12
Meeting title	:	第26回法政大学イオンビーム工学研究所シンポジウム
Held date	:	2007/12
Location (city)	:	小金井
Location (country)	:	日本
Patent information	:
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Paper URL	:
DOI for research data	:
Keywords	:	no keyword
Research Facility	:	TIARA(イオン照射研究施設)
Press Release	:
Article of JAEA R&D Review	:
Cooperating Institute	:

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Registration No. : BB20080048
JAEA Abstracts No. : 36000875
Paper Submission No. : 4201

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