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Report No.

Metastable chemisorption state of oxygen on Si(110)-16$$times$$2 surface observed by SR-PES

Yamamoto, Yoshihisa*; Togashi, Hideaki*; Kato, Atsushi*; Hasegawa, Satoshi*; Nakano, Takuya*; Goto, Seiichi*; Teraoka, Yuden; Yoshigoe, Akitaka ; Suemitsu, Maki*

In this study, we have investigated adsorption of oxygen molecules on Si(110)-16$$times$$2 clean surface at room temperature by synchrotron radiation photoemission spectros (SR-PES). The SR-PES experiments were conducted at the surface chemistry end-station of BL23SU in the SPring-8. The photon energy was 334 eV. Samples were B-doped p-type Si(110) wafers, and were flash-annealed in an UHV ambient prior to the exposure to oxygen gas at room temperature at the gas pressure of 6.7$$times$$10$$^{-6}$$ Pa. By observing a structural change after a mild annealing, we have confirmed presence of a metastable state of oxidation on this RT-oxidized Si(110) surface.



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