Metastable chemisorption state of oxygen on Si(110)-162 surface observed by SR-PES

Yamamoto, Yoshihisa*; Togashi, Hideaki*; Kato, Atsushi*; Hasegawa, Satoshi*; Nakano, Takuya*; Goto, Seiichi*; Teraoka, Yuden; Yoshigoe, Akitaka ; Suemitsu, Maki*

In this study, we have investigated adsorption of oxygen molecules on Si(110)-162 clean surface at room temperature by synchrotron radiation photoemission spectros (SR-PES). The SR-PES experiments were conducted at the surface chemistry end-station of BL23SU in the SPring-8. The photon energy was 334 eV. Samples were B-doped p-type Si(110) wafers, and were flash-annealed in an UHV ambient prior to the exposure to oxygen gas at room temperature at the gas pressure of 6.710 $^{-6}$ Pa. By observing a structural change after a mild annealing, we have confirmed presence of a metastable state of oxidation on this RT-oxidized Si(110) surface.

Language	:	English
Journal	:
Volume	:
Number	:
Pages	:
Publication Year/Month	:
Meeting title	:	3rd International Workshop on New Group IV Semiconductor Nanoelectronics
Held date	:	2007/11
Location (city)	:	Sendai
Location (country)	:	Japan
Patent information	:
PDF	:
Paper URL	:
DOI for research data	:
Keywords	:	no keyword
Research Facility	:	SPring-8(大型放射光施設)
Press Release	:
Article of JAEA R&D Review	:
Cooperating Institute	:	東北大学

Accesses	:	- Accesses
Web of Science® Times Cited Count	:	Times Cited Count： If you would like to get the latest times cited, please access the Web of Science®. http://www.webofknowledge.com/wos
InCites™	:
Altmetrics	:

Registration No. : BB20072936
JAEA Abstracts No. :
Paper Submission No. :

[CLARIVATE ANALYTICS], [WEB OF SCIENCE], [HIGHLY CITED PAPER & CUP LOGO] and [HOT PAPER & FIRE LOGO] are trademarks of Clarivate Analytics, and/or its affiliated company or companies, and used herein by permission and/or license.