Fluorination of PMDA-ODA polyimide using hyperthermal atomic fluorine beams

Tagawa, Masahito*; Yokota, Kumiko*; Maeda, Kenichi*; Yoshigoe, Akitaka ; Teraoka, Yuden; Akamatsu, Kensuke*; Nawafune, Hidemi*

Surface fluorination of PMDA-ODA polyimide has been performed by a hyperthermal F beam. The fundamental properties of the F-beam-exposed polyimide surface are reported based on the analytical results by X-ray photoelectron spectroscopy and contact angle measurements. It was observed that CF, CF or CF moieties were formed at the polyimide surfaces depending on the F beam fluences. Advancing contact angles of water can be controlled from 60 to 120 degrees by varying the F beam fluences. Surface roughness analyzed by atomic force microscopy slightly increased with atomic F beam exposures due probably to the formation of volatile products such as CF. This is confirmed by the mass change during F beam exposure by a quartz crystal microbalance.